A 3D hyper-accurate measuring microscope offering monocular or binocular observation with a clear, non-flare image, a wide field of view and a large stage. Offers the world’s highest XY measuring accuracy (0.9+3L/1000)μm and features three-axis, joystick controlled motorized drive and auto focus as standard. The ML series, high-NA objectives provide a long working distance and the illumination source, reflected or transmitted, is halogen, with a variable aperture diaphragm to suppress diffraction. The XY stage is a massive, highly stable design created using mechanical techniques developed over Mitutoyo’s long years of experience in manufacturing precision measuring microscopes. Maximum stage loading is 30kg and a range of useful fixtures is available that includes a wafer holder and swivel-centre support. An LAF (Laser Auto Focus) function is a factory-fit option which provides high repeatability when measuring small differences in height, enabling difficult measurements with minimum fatigue.